TY - JOUR
T1 - Sol-Gel Processed Barium Strontium Titanate Thin Films for
Microelectronic Applications
AU - Mohd Yusof, H. AU - Najamudin, S.H. AU - Rozana. Osman, A. AU - Poopalan, P.
JO - Journal of Engineering and Applied Sciences
VL - 12
IS - 14
SP - 3678
EP - 3681
PY - 2017
DA - 2001/08/19
SN - 1816-949x
DO - jeasci.2017.3678.3681
UR - https://makhillpublications.co/view-article.php?doi=jeasci.2017.3678.3681
KW - Sol-gel method
KW -Ba Sr TiO
KW -thin films analysis
KW -XRD
KW -microstructure analysis
AB - The sol-gel chemical preparation method has been applied in producing (Ba0.8 Sr0.2 TiO3 ) solution. The main precursor materials are barium acetate and strontium acetate powder. Acetic acid also has been used as
a solvent while titanium Isopropoxide and 2-Methoxyethanol are applied as stabilizer. Annealing process has
been used for crystallization of thin films ceramic material. These thin films sample are characterized using X-ray
Diffraction for crystalline structure and atomic force microscopy and scanning electron microscopy for
microstructure analysis.
ER -