TY  - JOUR
T1  - Micro-Electro-Mechanical System (MEMS) Breath Sensor for Polysomnography Study
AU - Yusoff, Noriah AU - Saad, Nor Hayati AU - Nabipoor, Mohsen AU - Sulaiman, Suraya AU - Rashid, Amirul Abd 
JO  - Journal of Engineering and Applied Sciences
VL  - 12
IS  - 14
SP  - 3758
EP  - 3761
PY  - 2017
DA  - 2001/08/19
SN  - 1816-949x
DO  - jeasci.2017.3758.3761
UR  - https://makhillpublications.co/view-article.php?doi=jeasci.2017.3758.3761
KW  - Breath sensor
KW  -MWCNT
KW  -inter-digitated electrode capacitve-typed sensor
KW  -sleep disorder monitoring device
KW  -technically complex modus
AB  - Sleep disorder study by means of Poly Somno Graphy (PSG) is the most well adopted and reliable procedure in medical practice. The present-day sleep monitoring devices for the PSG procedure is equipped with relatively expensive apparatus and technically complex modus operandi. This study is about development of a fast response Micro-Electro-Mechanical system (MEMs) breath sensor on the final design of the sleep monitoring device for sleep disorder study or personal therapy. This solid state breath sensor is constructed with micro tungsten Inter-Digitated Electrode (IDE) platform that covered with Multi-Walled Carbon Nano Tubes (MWCNT) as sensing material. The MWCNT is grown on a thin oxide layer on top of the tungsten IDE using Plasma Enhance Chemical Vapour Deposition (PECVD) technique. These MWCNT structures are capable of sensing and capturing breathing behaviour thus a fast response capacitive sensor is developed. A customized test jig imitating a human like breathing pulse was fabricated to test the sensor’s performance in relation to sensitivity and response time. The research reveals that this newly developed breath sensor device is highly sensitive and shows remarkably fast response within sub-second.
ER  -