H. Mohd Yusof, S.H. Najamudin, A. Rozana. Osman, P. Poopalan, Sol-Gel Processed Barium Strontium Titanate Thin Films for Microelectronic Applications, Journal of Engineering and Applied Sciences, Volume 12,Issue 14, 2017, Pages 3678-3681, ISSN 1816-949x, jeasci.2017.3678.3681, (https://makhillpublications.co/view-article.php?doi=jeasci.2017.3678.3681) Abstract: The sol-gel chemical preparation method has been applied in producing (Ba0.8 Sr0.2 TiO3 ) solution. The main precursor materials are barium acetate and strontium acetate powder. Acetic acid also has been used as a solvent while titanium Isopropoxide and 2-Methoxyethanol are applied as stabilizer. Annealing process has been used for crystallization of thin films ceramic material. These thin films sample are characterized using X-ray Diffraction for crystalline structure and atomic force microscopy and scanning electron microscopy for microstructure analysis. Keywords: Sol-gel method;Ba Sr TiO;thin films analysis;XRD;microstructure analysis