H. Mohd Yusof, S.H. Najamudin, A. Rozana. Osman, P. Poopalan,
Sol-Gel Processed Barium Strontium Titanate Thin Films for
Microelectronic Applications,
Journal of Engineering and Applied Sciences,
Volume 12,Issue 14,
2017,
Pages 3678-3681,
ISSN 1816-949x,
jeasci.2017.3678.3681,
(https://makhillpublications.co/view-article.php?doi=jeasci.2017.3678.3681)
Abstract: The sol-gel chemical preparation method has been applied in producing (Ba0.8 Sr0.2 TiO3 ) solution. The main precursor materials are barium acetate and strontium acetate powder. Acetic acid also has been used as
a solvent while titanium Isopropoxide and 2-Methoxyethanol are applied as stabilizer. Annealing process has
been used for crystallization of thin films ceramic material. These thin films sample are characterized using X-ray
Diffraction for crystalline structure and atomic force microscopy and scanning electron microscopy for
microstructure analysis.
Keywords: Sol-gel method;Ba Sr TiO;thin films analysis;XRD;microstructure analysis