TY  - JOUR
T1  - Sensing Properties of SnO<Sub>2</sub> Thin Films Prepared by Ultrasonic Nebulizer Method
AU - Haza&#39;A, Salah Q. AU - A. Salih, Ameer 
JO  - Journal of Engineering and Applied Sciences
VL  - 13
IS  - 23
SP  - 9903
EP  - 9907
PY  - 2018
DA  - 2001/08/19
SN  - 1816-949x
DO  - jeasci.2018.9903.9907
UR  - https://makhillpublications.co/view-article.php?doi=jeasci.2018.9903.9907
KW  - SnO2
KW  -thin films
KW  -gas sensors
KW  -substrate temperatures
KW  -optimum substrate
KW  -investigated
AB  - (SnO<sub>2</sub>) thin films have been deposited on glass substrate by using ultrasonic nebulizer method at different substrate temperature (200, 300, 400 and 500&deg;C). The effects of substrate temperature on the structural, surface morphological, optical and ethanol gas sensing properties of films have been investigated. X-ray diffraction patterns indicated that the films are single phase SnO<sub>2</sub> with polycrystalline tetragonal structure and preferred orientation in the (110) direction and crystallite size increases as the substrate temperature increases up to 400&deg;C but then decrease at 500&deg;C. The surface roughness is slightly increase with the increase of substrate temperature up to 400&deg;C and then decrease at 500&deg;C which has been investigated by Atomic Force Microscopy (AFM). The optical properties of the films have been studied over a wavelength (250-850) nm. A high optical energy-gap of 3.65 eV was achieved at temperature 400&deg;C. The effect of substrate temperature and operating temperature on performance of the sensor material has been investigated to choice optimum substrate temperature and optimum operating temperature for ethanol gas. The results showed high response to ethanol C<sub>2</sub>H<sub>5</sub>OH gas at operating temperature 225&deg;C for the SnO<sub>2</sub> film prepared at 400&deg;C substrate temperature.
ER  -