D.V.  Gusev, R.S.  Litvinenko, V.S.  Sukhanov, 
    Research of Silicon MEMS Pressure Transducers Crystals for
Robotics and Tactile Diagnostics Devices,
    Journal of Engineering and Applied Sciences,
    Volume 11,Issue 6,
    2016,
    Pages 1363-1365,
    ISSN 1816-949x,
    jeasci.2016.1363.1365,
    (https://makhillpublications.co/view-article.php?doi=jeasci.2016.1363.1365)
    Abstract: Owing to rapidly developing methods of minimally invasive surgery a new class of devices appeared. These devices are known as tactile sensors for remote palpation. They give a possibility to the surgeon not to enter into direct contact with the internal organs of the patient and obtain tactile data. The article presents the circuitry design of a silicon crystal matrix of piezoresistive pressure sensing elements MIPD-32 for tactile diagnostics devices. The crystal is manufactured by means of combination of MEMS and CMOS technologies. The research results of the characteristics of the crystals are shown.
    Keywords: Minimally Invasive Surgery (MIS);MEMS;tactile sensor;pressure;diagnostic