V.V.  Amelichev, V.V.  Platonov, S.S.  Generalov, S.V.  Nikiforov, D.A.  Zhukov, D.V.  Vasilyev, Yu.V.  Kazakov, Ya.V.  Goldberg, 
    Prospects and Applications of Thin-Film Magnetostrictive
Membranes for Mems Transducers,
    Journal of Engineering and Applied Sciences,
    Volume 12,Issue 7,
    2017,
    Pages 1935-1937,
    ISSN 1816-949x,
    jeasci.2017.1935.1937,
    (https://makhillpublications.co/view-article.php?doi=jeasci.2017.1935.1937)
    Abstract: The study gives an overview of the use of magnetostrictive films in physical quantities transducers
and demonstrates methodsof increasing their sensitive properties due to the implementation of magnetostrictive
materials in combination with corrugated membranes, manufactured using MEMS-technology process. This
research will provide results regarding magnetostrictive properties of FeNiCo 10 and 20-nm thin films formed
on the surface of silicon substrates.
    Keywords: Magnetostriction;thin film;MEMS transducer;thin membrane;India