Rusul A. Ghazi, Nahida B. Hasan, Investigation of C-V and Gas Sensor Characteristics of Cd1-xZnx S/n-Si Heterojunction Fabricated by Spray Pyrolysis Technique, Journal of Engineering and Applied Sciences, Volume 13,Issue 14, 2018, Pages 5926-5931, ISSN 1816-949x, jeasci.2018.5926.5931, (https://makhillpublications.co/view-article.php?doi=jeasci.2018.5926.5931) Abstract: In this research, Cd1-xZnx S thin films were prepared by spray pyrolysis technique on silicon substrate at a temperature 360oC. The reverse bias capacitance for Cd1-xZnx S/n-Si heterojunciton was measured as a function of bias voltage at frequency 1MHz . The capacitance decreases with increasing of reverse bias voltage and increase with vol. of (x), it increases from 334-577 pF with increase of the (x) while the depletion width decreasing with increasing (x). We noted that these heterojunction are abrupt and the value of built-in potential decreases from 0.7-0.27 V with increasing of the ZnS vol.%. The sensitivity as a function of operating temperature in the range 100-300°C for Cd1-xZnx Sthin films were prepared by spray pyrolysis technique on glass substrate at 360°C. It is obvious that the sensitivity of all films increases with increasing of the operating temperature. Keywords: C-V measurements;zinc sulfide;cadmium sulfide;Spray pyrolysis;sensitivity;operating temperature