Journal of Engineering and Applied Sciences
ISSN: Online 1818-7803ISSN: Print 1816-949x
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Prospects and Applications of Thin-Film Magnetostrictive Membranes for Mems Transducers
V.V. Amelichev, V.V. Platonov, S.S. Generalov, S.V. Nikiforov, D.A. Zhukov, D.V. Vasilyev, Yu.V. Kazakov and Ya.V. Goldberg
Page: 1935-1937 | Received 21 Sep 2022, Published online: 21 Sep 2022
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Abstract
The study gives an overview of the use of magnetostrictive films in physical quantities transducers and demonstrates methodsof increasing their sensitive properties due to the implementation of magnetostrictive materials in combination with corrugated membranes, manufactured using MEMS-technology process. This research will provide results regarding magnetostrictive properties of FeNiCo 10 and 20-nm thin films formed on the surface of silicon substrates.
How to cite this article:
V.V. Amelichev, V.V. Platonov, S.S. Generalov, S.V. Nikiforov, D.A. Zhukov, D.V. Vasilyev, Yu.V. Kazakov and Ya.V. Goldberg. Prospects and Applications of Thin-Film Magnetostrictive
Membranes for Mems Transducers.
DOI: https://doi.org/10.36478/jeasci.2017.1935.1937
URL: https://www.makhillpublications.co/view-article/1816-949x/jeasci.2017.1935.1937